发明申请
US20120023769A1 Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate
有权
包括附着在基板上的测量刻度的组件以及用于将基板保持测量刻度的方法
- 专利标题: Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate
- 专利标题(中): 包括附着在基板上的测量刻度的组件以及用于将基板保持测量刻度的方法
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申请号: US13260891申请日: 2010-02-23
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公开(公告)号: US20120023769A1公开(公告)日: 2012-02-02
- 发明人: Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
- 申请人: Peter Speckbacher , Josef Weidmann , Wolfgang Holzapfel
- 优先权: DE102009002142.6 20090402
- 国际申请: PCT/EP10/52239 WO 20100223
- 主分类号: G01D5/347
- IPC分类号: G01D5/347 ; B23P11/00
摘要:
An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.
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