发明申请
US20120028189A1 RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND COMPOUND 有权
辐射敏感性树脂组合物,形成耐火图案的方法,聚合物和化合物

  • 专利标题: RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND COMPOUND
  • 专利标题(中): 辐射敏感性树脂组合物,形成耐火图案的方法,聚合物和化合物
  • 申请号: US13191416
    申请日: 2011-07-26
  • 公开(公告)号: US20120028189A1
    公开(公告)日: 2012-02-02
  • 发明人: Yusuke AsanoMitsuo Sato
  • 申请人: Yusuke AsanoMitsuo Sato
  • 申请人地址: JP Tokyo
  • 专利权人: JSR Corporation
  • 当前专利权人: JSR Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2010-168055 20100727
  • 主分类号: G03F7/20
  • IPC分类号: G03F7/20 C08F214/18 C07C69/653 G03F7/004
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND COMPOUND
摘要:
A radiation-sensitive resin composition includes (A) a fluorine-containing compound that includes a group shown by the following formula (1), and (B) a photoacid generator. wherein RC represents a (p+1)-valent aromatic ring group, Q represents a linking group obtained by removing one hydrogen atom from a monovalent hydrophilic group, RE represents a hydrogen atom or a hydrocarbon group having 1 to 10 carbon atoms, p is an integer from 1 to 5, provided that a plurality of Q and a plurality of RE may respectively be either the same or different when p is an integer from 2 to 5, and “*” indicates a bonding hand.
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