发明申请
US20120028189A1 RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND COMPOUND
有权
辐射敏感性树脂组合物,形成耐火图案的方法,聚合物和化合物
- 专利标题: RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND COMPOUND
- 专利标题(中): 辐射敏感性树脂组合物,形成耐火图案的方法,聚合物和化合物
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申请号: US13191416申请日: 2011-07-26
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公开(公告)号: US20120028189A1公开(公告)日: 2012-02-02
- 发明人: Yusuke Asano , Mitsuo Sato
- 申请人: Yusuke Asano , Mitsuo Sato
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-168055 20100727
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; C08F214/18 ; C07C69/653 ; G03F7/004
摘要:
A radiation-sensitive resin composition includes (A) a fluorine-containing compound that includes a group shown by the following formula (1), and (B) a photoacid generator. wherein RC represents a (p+1)-valent aromatic ring group, Q represents a linking group obtained by removing one hydrogen atom from a monovalent hydrophilic group, RE represents a hydrogen atom or a hydrocarbon group having 1 to 10 carbon atoms, p is an integer from 1 to 5, provided that a plurality of Q and a plurality of RE may respectively be either the same or different when p is an integer from 2 to 5, and “*” indicates a bonding hand.
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