发明申请
US20120028458A1 ALPHA PARTICLE BLOCKING WIRE STRUCTURE AND METHOD FABRICATING SAME
有权
ALPHA颗粒阻塞线结构和方法制造
- 专利标题: ALPHA PARTICLE BLOCKING WIRE STRUCTURE AND METHOD FABRICATING SAME
- 专利标题(中): ALPHA颗粒阻塞线结构和方法制造
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申请号: US12052881申请日: 2008-03-21
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公开(公告)号: US20120028458A1公开(公告)日: 2012-02-02
- 发明人: Cyril Cabral, JR. , K. Paul Muller , Kenneth P. Rodbell
- 申请人: Cyril Cabral, JR. , K. Paul Muller , Kenneth P. Rodbell
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/556
摘要:
An alpha particle blocking structure and method of making the structure. The structure includes: a semiconductor substrate; a set of interlevel dielectric layers stacked from a lowermost interlevel dielectric layer closest to the substrate to a uppermost interlevel dielectric layer furthest from the substrate, each interlevel dielectric layer of the set of interlevel dielectric layers including electrically conductive wires, top surfaces of the wires substantially coplanar with top surfaces of corresponding interlevel dielectric layers; an electrically conductive terminal pad contacting a wire pad of the uppermost interlevel dielectric layer; an electrically conductive plating base layer contacting a top surface of the terminal pad; and a copper block on the plating base layer.
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