发明申请
US20120031327A1 APPARATUS FOR CONTROLLED APPLICATION OF LIQUID STREAMS TO A SUBSTRATE WITH DIVERTED LIQUID COLLECTION SYSTEM 审中-公开
用于控制液体流向带有液体收集系统的基板的控制装置

APPARATUS FOR CONTROLLED APPLICATION OF LIQUID STREAMS TO A SUBSTRATE WITH DIVERTED LIQUID COLLECTION SYSTEM
摘要:
An improved system for application of liquid streams to a substrate. The system incorporates open face flow channels for carrying the liquid away from fully enclosed flow segments prior to discharge along an unconstrained flow path. The present invention further provides an improved, self-aligning modular assembly for delivery of impingement jet to the liquid streams for diverting the direction of the liquid streams. The present invention further provides an improved arrangement for collection of the deflected liquid in response to application of the impingement jet without excess residue build-up.
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