Invention Application
US20120034136A1 SYMMETRIC VHF PLASMA POWER COUPLER WITH ACTIVE UNIFORMITY STEERING
失效
具有主动均匀转向的对称甚高频等离子功率耦合器
- Patent Title: SYMMETRIC VHF PLASMA POWER COUPLER WITH ACTIVE UNIFORMITY STEERING
- Patent Title (中): 具有主动均匀转向的对称甚高频等离子功率耦合器
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Application No.: US13050481Application Date: 2011-03-17
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Publication No.: US20120034136A1Publication Date: 2012-02-09
- Inventor: Kenneth S. Collins , Zhigang Chen , Kartik Ramaswamy , James D. Carducci , Shahid Rauf , Andrew Nguyen
- Applicant: Kenneth S. Collins , Zhigang Chen , Kartik Ramaswamy , James D. Carducci , Shahid Rauf , Andrew Nguyen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B01J19/08
- IPC: B01J19/08
Abstract:
A coaxial VHF power coupler includes conductive element inside a hollow cylindrical outer conductor of the power coupler and surrounding an axial section of a hollow cylindrical inner conductor of the power coupler. Respective plural motor drives contacting the hollow cylindrical outer conductor are connected to respective locations of the movable conductive element.
Public/Granted literature
- US08652297B2 Symmetric VHF plasma power coupler with active uniformity steering Public/Granted day:2014-02-18
Information query
