发明申请
US20120034566A1 MICRO-CHANNEL DEVICE AND METHOD FOR FABRICATING MICRO-CHANNEL DEVICE
审中-公开
用于制造微通道器件的微通道器件和方法
- 专利标题: MICRO-CHANNEL DEVICE AND METHOD FOR FABRICATING MICRO-CHANNEL DEVICE
- 专利标题(中): 用于制造微通道器件的微通道器件和方法
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申请号: US13259840申请日: 2010-03-29
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公开(公告)号: US20120034566A1公开(公告)日: 2012-02-09
- 发明人: Hiroo Wada , Hiroshi Tamura , Hiroshi Kobayashi , Tomofumi Kiyomoto , Seokhyoung Hong
- 申请人: Hiroo Wada , Hiroshi Tamura , Hiroshi Kobayashi , Tomofumi Kiyomoto , Seokhyoung Hong
- 申请人地址: JP Tokyo JP Kyoto-shi, Kyoto
- 专利权人: TOKYO ELECTRON LIMITED,SHINWA CHEMICAL INDUSTRIES LTD.
- 当前专利权人: TOKYO ELECTRON LIMITED,SHINWA CHEMICAL INDUSTRIES LTD.
- 当前专利权人地址: JP Tokyo JP Kyoto-shi, Kyoto
- 优先权: JP2009-085719 20090331
- 国际申请: PCT/JP2010/055561 WO 20100329
- 主分类号: B01L3/00
- IPC分类号: B01L3/00 ; B23P17/04 ; G01N30/00 ; G03F7/20
摘要:
A micro-channel device provided in a solution analysis system using pressure liquid feed comprises a plurality of straight-line channels and curved channels connecting the ends of the neighboring straight-line channels. The width w of each curved channel is smaller than the width t of each straight-line channel. The radius of curvature r of each curved channel is set so that the value of a expressed by formula (1) is equal to or smaller than the value of a at a local maximum point of the theoretical step height H expressed by formula (2) and based on the shape of the curved channel. a=w/r (1) H = u c w 2 64 γ D m × a 2 ( a + 2 ) a + 1 ( 2 ) Where, w is a width of the curved channel, uc is a channel passing speed of a solution in the curved channel, γ is a molecular diffusion inhibition factor by basic members present in the curved channel, and Dm is a molecular diffusion coefficient of the solution.
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