发明申请
- 专利标题： Semiconductor Light-Emitting Device, Surface-Emission Laser Diode, and Production Apparatus Thereof, Production Method, Optical Module and Optical Telecommunication System
- 专利标题（中）： 半导体发光器件，表面发射激光二极管及其生产设备，生产方法，光学模块和光通信系统
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申请号： US13165027申请日： 2011-06-21
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公开(公告)号： US20120040515A1公开(公告)日： 2012-02-16
- 发明人: Takashi Takahashi , Morimasa Kaminishi , Shunichi Sato , Akihiro Itoh , Naoto Jikutani
- 申请人： Takashi Takahashi , Morimasa Kaminishi , Shunichi Sato , Akihiro Itoh , Naoto Jikutani
- 优先权： JP2001-089068 20010327; JP2001-210462 20010711; JP2001-252537 20010823; JP2001-253382 20010823; JP2001-262902 20010831; JP2001-288367 20010921; JP2001-292958 20010926; JP2001-293353 20010926; JP2001-297936 20010927; JP2001-297937 20010927; JP2001-297938 20010927; JP2001-297939 20010927; JP2001-390927 20011225; JP2002-029822 20020206; JP2002-065431 20020311; JP2003-077419 20030320
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; B01J8/00 ; C23C16/34
摘要：
A semiconductor light-emitting device has a semiconductor layer containing Al between a substrate and an active layer containing nitrogen, wherein Al and oxygen are removed from a growth chamber before growing said active layer and a concentration of oxygen incorporated into said active layer together with Al is set to a level such that said semiconductor light-emitting device can perform a continuous laser oscillation at room temperature.
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