发明申请
- 专利标题: TANTALUM-BASED ELECTRODE STACK
- 专利标题(中): 基于TANTALUM的电极堆叠
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申请号: US12861785申请日: 2010-08-23
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公开(公告)号: US20120044612A1公开(公告)日: 2012-02-23
- 发明人: Willem F. A. Besling , Aarnoud L. Roest , Klaus Reimann , Linda van Leuken-Peters
- 申请人: Willem F. A. Besling , Aarnoud L. Roest , Klaus Reimann , Linda van Leuken-Peters
- 申请人地址: NL Eindhoven
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: NL Eindhoven
- 主分类号: H01G4/008
- IPC分类号: H01G4/008 ; C23C14/34
摘要:
An electronic device includes a metal-insulator-metal capacitive device. In connection with an example embodiment, a metal-insulator-metal (MIM) capacitor device is in a substrate having a surface and a three dimensional structure with high aspect ratio sidewalls. The MIM capacitor device includes a first capacitor electrode including a platinum group metal (PGM)-based layer and a Ta-based layer that is between the PGM-based layer and one of the sidewalls. The MIM capacitor also includes a second capacitor electrode and an insulator material between the first and second electrodes.
公开/授权文献
- US08570706B2 Tantalum-based electrode stack 公开/授权日:2013-10-29
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