发明申请
- 专利标题: FINE PARTICLE MEASUREMENT APPARATUS AND OPTICAL AXIS CALIBRATION METHOD
- 专利标题(中): 微粒测量装置和光轴校准方法
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申请号: US13204206申请日: 2011-08-05
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公开(公告)号: US20120050737A1公开(公告)日: 2012-03-01
- 发明人: Suguru Dowaki , Shingo Imanishi , Gakuji Hashimoto , Shunpei Suzuki
- 申请人: Suguru Dowaki , Shingo Imanishi , Gakuji Hashimoto , Shunpei Suzuki
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-186961 20100824
- 主分类号: G01N21/47
- IPC分类号: G01N21/47
摘要:
Disclosed is a fine particle measurement apparatus including a light condensing unit that condenses irradiated light irradiated to a sample flow where fine particles pass through and directly propagates the light without scattering, and scattered light scattered by the fine particles to an optical receiver divided into a plurality of regions; a position controller that controls the relative positions of members of an optical path; and a control unit that detects positions of condensing spots of the irradiated light and the scattered light based on signal intensities of each region of the optical receiver, and controls the position controller such that the positions of the condensing spots of the irradiated light and the scattered light match with each other.
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