发明申请
- 专利标题: Circuit Apparatus Having a Rounded Trace
- 专利标题(中): 具有圆形迹线的电路装置
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申请号: US12870041申请日: 2010-08-27
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公开(公告)号: US20120052417A1公开(公告)日: 2012-03-01
- 发明人: Matthew S. Doyle , Joseph Kuczynski , Kevin A. Splittstoesser , Timothy J. Tofil
- 申请人: Matthew S. Doyle , Joseph Kuczynski , Kevin A. Splittstoesser , Timothy J. Tofil
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F7/20 ; C25D7/00 ; G06F17/50
摘要:
In various embodiments of the present invention a circuit apparatus having a rounded trace, a method to manufacture the circuit apparatus, and a design structure used in the design, testing, or manufacturing of the circuit apparatus are described. An artwork layer having an adaptable-mask section allows a graded amount of light to pass into an underlying photoresist layer. Subsequent to developing the photoresist layer, the graded amount of light creates a rounded geometric void used as a mold or sidewall for the creation of at least a portion of a rounded trace. The photoresist layer is removed resulting in a circuit apparatus having a rounded trace.
公开/授权文献
- US09229318B2 Circuit apparatus having a rounded trace 公开/授权日:2016-01-05