发明申请
- 专利标题： IN-LINE INSPECTION YIELD PREDICTION SYSTEM
- 专利标题（中）： 在线检测预测系统
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申请号： US12873942申请日： 2010-09-01
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公开(公告)号： US20120053855A1公开(公告)日： 2012-03-01
- 发明人: Hsiang-Chou Liao , Che-Lun Hung , Tuung Luoh , Ling-Wuu Yang , Ta-Hone Yang , Kuang-Chao Chen
- 申请人： Hsiang-Chou Liao , Che-Lun Hung , Tuung Luoh , Ling-Wuu Yang , Ta-Hone Yang , Kuang-Chao Chen
- 专利权人： Macronix International Co., Ltd.
- 当前专利权人： Macronix International Co., Ltd.
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A method of predicting product yield may include determining defect characteristics for a product based at least in part on inspection data associated with critical layers of the product, determining yield loss for each of the critical layers, and estimating product yield based on the determined yield loss of the critical layers. A corresponding apparatus is also provided.
公开/授权文献
- US08594963B2 In-line inspection yield prediction system 公开/授权日：2013-11-26
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