A micro spherical stylus manufacturing machine includes a three-axis moving unit movably disposed on a processing platform and connected to a single-pulse electrical monitoring unit; a detachable jig movably disposed on the moving unit for clamping a workpiece; a reeling and electrical discharging unit disposed on the processing platform and connected to the single-pulse electrical monitoring unit for processing the workpiece by electrical discharge machining (EDM) to form a pointed conical electrode instrument; an electrical discharging unit disposed on the processing platform and connected to the single-pulse electrical monitoring unit for processing the point of the workpiece by EDM to form a sphere; and an optical measuring unit disposed on the processing platform and connected to the single-pulse electrical monitoring unit for measuring the workpiece. Micro spherical styluses are manufactured and evaluated with the machine concurrently. Afterward, the machine turns into a coordinate measuring machine through the micro spherical styluses.