Invention Application
- Patent Title: PRESSURE-SENSITIVE ADHESIVE SHEET FOR PROTECTING SEMICONDUCTOR WAFER
- Patent Title (中): 用于保护半导体波形的压敏粘合片
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Application No.: US13223629Application Date: 2011-09-01
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Publication No.: US20120056338A1Publication Date: 2012-03-08
- Inventor: Takashi HABU , Fumiteru ASAI , Tomokazu TAKAHASHI , Eiichi IMOTO , Yuta SHIMAZAKI
- Applicant: Takashi HABU , Fumiteru ASAI , Tomokazu TAKAHASHI , Eiichi IMOTO , Yuta SHIMAZAKI
- Applicant Address: JP Osaka
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Osaka
- Priority: JP2010-196252 20100901
- Main IPC: H01L23/29
- IPC: H01L23/29

Abstract:
The present invention provides a pressure-sensitive adhesive sheet for protecting a semiconductor wafer, which does not cause curve (warpage) in the semiconductor wafer, when the semiconductor wafer is ground, is excellent in followability to a pattern, has adequate stress dispersibility in a grinding operation, suppresses the crack in a wafer and chipping in a wafer edge, and does not leave a residue of a tackiness agent on the surface of the wafer. The protective sheet has one face having tackiness, does not have an interface existing between a substrate and the tackiness agent and is made of one layer, and the pressure-sensitive adhesive sheet has different tack strengths on both faces from each other.
Public/Granted literature
- US08546958B2 Pressure-sensitive adhesive sheet for protecting semiconductor wafer Public/Granted day:2013-10-01
Information query
IPC分类: