发明申请
- 专利标题： IMPRINT APPARATUS AND METHOD
- 专利标题（中）： 印刷装置和方法
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申请号： US13230554申请日： 2011-09-12
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公开(公告)号： US20120061882A1公开(公告)日： 2012-03-15
- 发明人: Yohko Furutono , Shinji Mikami , Masayuki Hatano , Tetsuro Nakasugi
- 申请人： Yohko Furutono , Shinji Mikami , Masayuki Hatano , Tetsuro Nakasugi
- 优先权： JP2010-204608 20100913
- 主分类号： B29C35/08
- IPC分类号： B29C35/08
摘要：
In one embodiment, an imprint apparatus includes a template holding part configured to hold a template for imprint. The apparatus further includes a template moving part configured to move the template to press the template onto a light curing resin on a transfer target substrate or to demold the template from the light curing resin. The apparatus further includes a light source configured to irradiate the light curing resin with light to cure the light curing resin. The apparatus further includes a demold control part configured to control a demold speed or a demold angle of the template, based on a position of a shot region from which the template is to be demolded, when demolding the template from the light curing resin.
公开/授权文献
- US08550801B2 Imprint apparatus and method 公开/授权日：2013-10-08
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