发明申请
US20120068239A1 SEMICONDUCTOR MEMORY DEVICE HAVING A FLOATING BODY CAPACITOR, MEMORY CELL ARRAY HAVING THE SAME AND METHOD OF MANUFACTURING THE SAME 有权
具有浮动体电容器的半导体存储器件,具有该浮动体电容器的存储器单元阵列及其制造方法

  • 专利标题: SEMICONDUCTOR MEMORY DEVICE HAVING A FLOATING BODY CAPACITOR, MEMORY CELL ARRAY HAVING THE SAME AND METHOD OF MANUFACTURING THE SAME
  • 专利标题(中): 具有浮动体电容器的半导体存储器件,具有该浮动体电容器的存储器单元阵列及其制造方法
  • 申请号: US13304470
    申请日: 2011-11-25
  • 公开(公告)号: US20120068239A1
    公开(公告)日: 2012-03-22
  • 发明人: Jong Su KIM
  • 申请人: Jong Su KIM
  • 申请人地址: KR Icheon-si
  • 专利权人: HYNIX SEMICONDUCTOR INC.
  • 当前专利权人: HYNIX SEMICONDUCTOR INC.
  • 当前专利权人地址: KR Icheon-si
  • 优先权: KR10-2007-0129024 20071212
  • 主分类号: H01L27/105
  • IPC分类号: H01L27/105 H01L21/283 H01L27/06
SEMICONDUCTOR MEMORY DEVICE HAVING A FLOATING BODY CAPACITOR, MEMORY CELL ARRAY HAVING THE SAME AND METHOD OF MANUFACTURING THE SAME
摘要:
A semiconductor memory device having a floating body capacitor. The semiconductor memory device can perform a memory operation using the floating body capacitor. The semiconductor memory device includes an SOI substrate having a staked structure in which a base substrate having a conducting surface, a buried insulating layer and a device-forming layer are staked, a transistor formed in a portion of the device-forming layer, having a gate, a source region and a drain region, and a capacitor formed by the buried insulating layer, the conducting surface of the base substrate, and accumulated holes generated in the device-forming layer when the transistor is driven.
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