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Invention Application
US20120069336A1 INTRA-CAVITY ELLIPSOMETER SYSTEM AND METHOD 审中-公开
内部电磁阀系统及方法

  • Patent Title: INTRA-CAVITY ELLIPSOMETER SYSTEM AND METHOD
  • Patent Title (中): 内部电磁阀系统及方法
  • Application No.: US13265841
    Application Date: 2010-05-04
  • Publication No.: US20120069336A1
    Publication Date: 2012-03-22
  • Inventor: Theodore Peter Rakitzis
  • Applicant: Theodore Peter Rakitzis
  • International Application: PCT/IB10/01154 WO 20100504
  • Main IPC: G01J4/00
  • IPC: G01J4/00
INTRA-CAVITY ELLIPSOMETER SYSTEM AND METHOD
Abstract:
A resonant optical cavity ellipsometer system is provided. The system can be used to conduct time-dependent arid sensitive measurement of ellipsometric parameters of matter. In a particular use, the system can provide time resolution abetter than 1 microsecond. In a particular implementation, matter can be probed within the evanescent wave generated by intra-cavity total reflection.
Abstract(Chinese):

提供了一种谐振光学腔椭偏仪系统。 该系统可用于对物体的椭偏参数进行时间依赖和干扰敏感测量。 在特定用途中，该系统可提供超过1微秒的时间分辨率。 在一个特定的实现中，可以在由腔内全反射产生的ev逝波内探测物质。

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