发明申请
- 专利标题: Sensor system for detecting high pressures
- 专利标题(中): 用于检测高压的传感器系统
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申请号: US13138674申请日: 2010-02-01
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公开(公告)号: US20120073379A1公开(公告)日: 2012-03-29
- 发明人: Marcus Ahles , Hubert Benzel
- 申请人: Marcus Ahles , Hubert Benzel
- 优先权: DE102009002004.7 20090331
- 国际申请: PCT/EP2010/051138 WO 20100201
- 主分类号: G01L7/08
- IPC分类号: G01L7/08
摘要:
A sensor system for detecting high pressures includes a micromechanical sensor element which is situated on a support and is mounted via this support. A diaphragm is formed in the upper surface of the sensor element, the diaphragm spanning a cavern having a rear opening. The support has a passage opening and is connected to the rear side of the sensor element in such a way that the passage opening opens into the rear opening of the cavern. An annular recess is formed in the rear side of the sensor element, the annular recess being situated above the edge area of the passage opening, so that the joining surface between the sensor element and the support does not extend to the edge of the passage opening.
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