发明申请
US20120079635A1 METHODS AND DEVICES FOR CORRECTING ERRORS IN ATOMIC FORCE MICROSCOPY
有权
用于校正原子力显微镜中的误差的方法和装置
- 专利标题： METHODS AND DEVICES FOR CORRECTING ERRORS IN ATOMIC FORCE MICROSCOPY
- 专利标题（中）： 用于校正原子力显微镜中的误差的方法和装置
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申请号： US13190643申请日： 2011-07-26
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公开(公告)号： US20120079635A1公开(公告)日： 2012-03-29
- 发明人: Huiwen Liu , Peter Gunderson , Lin Zhou
- 申请人： Huiwen Liu , Peter Gunderson , Lin Zhou
- 申请人地址： US CA Cupertino
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Cupertino
- 主分类号： G01Q60/24
- IPC分类号： G01Q60/24
摘要：
In certain embodiments, a probe scans a surface to produce a first scan. The first scan is used to estimate a vertical offset for scanning the surface to produce a second scan. In certain embodiments, an AFM device engages a probe to a surface using a piezo voltage. The probe scans the surface to produce a first scan. The first scan is used to estimate a vertical offset such that the probe uses the piezo voltage to engage the surface for a second scan at a different vertical position.