发明申请
- 专利标题: DRAWING DEVICE AND DRAWING METHOD
- 专利标题(中): 绘图装置和绘图方法
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申请号: US13086762申请日: 2011-04-14
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公开(公告)号: US20120081681A1公开(公告)日: 2012-04-05
- 发明人: Yoshiyuki NAKAZAWA , Yoshio FURUYA , Ryosuke ITO , Kenji NAKANISHI , Kazutaka TANIGUCHI , Ryo YAMADA
- 申请人: Yoshiyuki NAKAZAWA , Yoshio FURUYA , Ryosuke ITO , Kenji NAKANISHI , Kazutaka TANIGUCHI , Ryo YAMADA
- 优先权: JPJP2010-220796 20100930; JPJP2011-047372 20110304
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03F7/20
摘要:
A drawing device draws a pattern on a substrate by radiating light from an optical head part on a target object (for example, substrate) which relatively moves with respect to the optical head part. Here, the optical head part has a spatial modulating unit which spatially modulates light from a light source, based on pattern data, and an optical path corrector which shifts the route of light spatially modulated in the spatial modulating unit at precision subdivided more than units of spatial modulation in the spatial modulating unit (more specifically, for example, units of pixels of spatial light modulator).
公开/授权文献
- US09041907B2 Drawing device and drawing method 公开/授权日:2015-05-26
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