发明申请
US20120081681A1 DRAWING DEVICE AND DRAWING METHOD 有权
绘图装置和绘图方法

DRAWING DEVICE AND DRAWING METHOD
摘要:
A drawing device draws a pattern on a substrate by radiating light from an optical head part on a target object (for example, substrate) which relatively moves with respect to the optical head part. Here, the optical head part has a spatial modulating unit which spatially modulates light from a light source, based on pattern data, and an optical path corrector which shifts the route of light spatially modulated in the spatial modulating unit at precision subdivided more than units of spatial modulation in the spatial modulating unit (more specifically, for example, units of pixels of spatial light modulator).
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