发明申请
- 专利标题: MEMS MICROPHONE
- 专利标题(中): MEMS麦克风
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申请号: US13282668申请日: 2011-10-27
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公开(公告)号: US20120093346A1公开(公告)日: 2012-04-19
- 发明人: Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
- 申请人: Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
- 申请人地址: DE Munchen
- 专利权人: EPCOS AG
- 当前专利权人: EPCOS AG
- 当前专利权人地址: DE Munchen
- 优先权: DE1020090019446.0 20090429
- 主分类号: H04R1/00
- IPC分类号: H04R1/00
摘要:
A microphone package wherein an MEMS microphone chip (MIC) is mounted on a substrate (SUB) and is sealed with a cover (ABD) with respect to the substrate. The membrane (MMB) of the microphone chip is connected to a sound entry opening (SEO) in the substrate via an acoustic channel. As a result of defined dimensioning of, in particular, the cross section and length of sound entry opening and channel, an acoustic low-pass filter is formed, the −3 dB attenuation point of which is significantly below the natural resonance of microphone membrane and package.
公开/授权文献
- US08571239B2 MEMS microphone 公开/授权日:2013-10-29
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