发明申请
US20120094234A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, AND METHOD FOR FORMING RESIST PATTERN
有权
辐射敏感性树脂组合物,聚合物和形成耐火图案的方法
- 专利标题: RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER, AND METHOD FOR FORMING RESIST PATTERN
- 专利标题(中): 辐射敏感性树脂组合物,聚合物和形成耐火图案的方法
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申请号: US13309573申请日: 2011-12-02
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公开(公告)号: US20120094234A1公开(公告)日: 2012-04-19
- 发明人: Yasuhiko MATSUDA , Tomohisa FUJISAWA , Yukari HAMA , Takanori KAWAKAMI
- 申请人: Yasuhiko MATSUDA , Tomohisa FUJISAWA , Yukari HAMA , Takanori KAWAKAMI
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-135551 20090604
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; C08F220/22 ; G03F7/004
摘要:
The radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation sensitive acid generator. The first polymer includes a repeating unit represented by formula (1). The second polymer includes an acid labile group and is dissociated by an action of acid so that alkali solubility is given by dissociation of said acid labile group. R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group. R2 represents a single bond or a divalent linear, branched or cyclic, saturated or unsaturated hydrocarbon group having 1-20 carbon atoms. X represents a fluorine atom-substituted methylene group or a linear or branched fluoroalkylene group having 2-20 carbon atoms. R3 represents a hydrogen atom or a monovalent organic group.
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