发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 非易失性存储器件及其制造方法
-
申请号: US13132544申请日: 2009-06-30
-
公开(公告)号: US20120097915A1公开(公告)日: 2012-04-26
- 发明人: Takumi Mikawa , Yoshio Kawashima , Atsushi Himeno
- 申请人: Takumi Mikawa , Yoshio Kawashima , Atsushi Himeno
- 优先权: JP2008-308162 20081203
- 国际申请: PCT/JP2009/003004 WO 20090630
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/02
摘要:
There are provided a resistance variable nonvolatile memory device which changes its resistance stably at low voltages and is suitable for a miniaturized configuration, and a manufacturing method thereof. The nonvolatile memory device comprises: a substrate (100); a first electrode (101); an interlayer insulating layer (102); a memory cell hole (103) formed in the interlayer insulating layer; a first resistance variable layer (104a) formed in at least a bottom portion of the memory cell hole and connected to the first electrode; a second resistance variable layer (104b) formed inside the memory cell hole (103) and located on the first resistance variable layer (104a); and a second electrode (105); the first resistance variable layer (104a) and the second resistance variable layer (104b) respectively comprising metal oxides of the same kind; and the first resistance variable layer (104a) having a higher oxygen content than the second resistance variable layer (104b).
公开/授权文献
- US08426836B2 Nonvolatile memory device and manufacturing method thereof 公开/授权日:2013-04-23
信息查询
IPC分类: