Invention Application
US20120104472A1 FIN-LIKE FIELD EFFECT TRANSISTOR (FINFET) DEVICE AND METHOD OF MANUFACTURING SAME
有权
FIN状势场效应晶体管(FINFET)器件及其制造方法
- Patent Title: FIN-LIKE FIELD EFFECT TRANSISTOR (FINFET) DEVICE AND METHOD OF MANUFACTURING SAME
- Patent Title (中): FIN状势场效应晶体管(FINFET)器件及其制造方法
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Application No.: US12917902Application Date: 2010-11-02
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Publication No.: US20120104472A1Publication Date: 2012-05-03
- Inventor: Jeff J. Xu , Chih-Hao Chang
- Applicant: Jeff J. Xu , Chih-Hao Chang
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
A FinFET device and method for fabricating a FinFET device is disclosed. An exemplary method includes providing a semiconductor substrate; forming a first fin structure and a second fin structure over the semiconductor substrate; forming a gate structure over a portion of the first and second fin structures, such that the gate structure traverses the first and second fin structures; epitaxially growing a first semiconductor material on exposed portions of the first and second fin structures, such that the exposed portions of the first and second fin structures are merged together; and epitaxially growing a second semiconductor material over the first semiconductor material.
Public/Granted literature
- US09166022B2 Fin-like field effect transistor (FinFET) device and method of manufacturing same Public/Granted day:2015-10-20
Information query
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