发明申请
- 专利标题： Semiconductor Device Having Island Type Support Patterns
- 专利标题（中）： 具有岛型支持模式的半导体器件
-
申请号： US13238408申请日： 2011-09-21
-
公开(公告)号： US20120104559A1公开(公告)日： 2012-05-03
- 发明人: Hyun-Chul Kim
- 申请人： Hyun-Chul Kim
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2010-0107011 20101029
- 主分类号： H01L29/06
- IPC分类号： H01L29/06
摘要：
A semiconductor device includes a plurality of cylindrical structures arranged in a first direction and a second direction, and a plurality of unit regions formed in the first direction and the second direction, each of the plurality of unit regions including an island type support pattern supporting the plurality of cylindrical structures contacting side surfaces of the plurality of cylindrical structures and an open region exposing the side surfaces of the plurality of cylindrical structures.
信息查询
IPC分类:
