发明申请
- 专利标题: Electrostatic Capacitance Type Physical Quantity Sensor and Angular Velocity Sensor
- 专利标题(中): 静电电容式物理量传感器和角速度传感器
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申请号: US13382395申请日: 2010-07-15
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公开(公告)号: US20120105080A1公开(公告)日: 2012-05-03
- 发明人: Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
- 申请人: Hiroshi Iwasawa , Masahiro Matsumoto , Toshiaki Nakamura
- 申请人地址: JP Ibaraki
- 专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人: Hitachi Automotive Systems, Ltd.
- 当前专利权人地址: JP Ibaraki
- 优先权: JP2009-200508 20090831
- 国际申请: PCT/JP2010/062012 WO 20100715
- 主分类号: G01R27/26
- IPC分类号: G01R27/26
摘要:
The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5 pF
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