发明申请
US20120105080A1 Electrostatic Capacitance Type Physical Quantity Sensor and Angular Velocity Sensor 有权
静电电容式物理量传感器和角速度传感器

Electrostatic Capacitance Type Physical Quantity Sensor and Angular Velocity Sensor
摘要:
The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5 pF
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