发明申请
US20120107982A1 MANUFACTURING METHOD FOR ARRAY SUBSTRATE WITH FRINGE FIELD SWITCHING TYPE THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY
有权
具有FRINGE场切换型薄膜晶体管液晶显示器的阵列基板的制造方法
- 专利标题: MANUFACTURING METHOD FOR ARRAY SUBSTRATE WITH FRINGE FIELD SWITCHING TYPE THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY
- 专利标题(中): 具有FRINGE场切换型薄膜晶体管液晶显示器的阵列基板的制造方法
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申请号: US13381157申请日: 2011-04-26
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公开(公告)号: US20120107982A1公开(公告)日: 2012-05-03
- 发明人: Youngsuk Song , Seungjin Choi , Seongyeol Yoo
- 申请人: Youngsuk Song , Seungjin Choi , Seongyeol Yoo
- 申请人地址: CN Beijing
- 专利权人: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Beijing
- 优先权: CN201010158983.3 20100426
- 国际申请: PCT/CN2011/073335 WO 20110426
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Disclosed is a method for manufacturing an array substrate of an FFS type TFT-LCD, comprising the steps of: forming a first transparent conductive film, a first metal film and an impurity-doped semiconductor film on a transparent substrate sequentially, and then patterning the stack of the films to form patterns including source electrodes, drain electrodes, data lines and pixel electrodes; forming a semiconductor film and patterning it to form a pattern of the impurity-doped semiconductor layer and a pattern of the semiconductor layer including TFT channels; forming an insulating film and a second metal film, and patterning the stack of the films to form patterns including connection holes of the data lines in a PAD region, gate lines, gate electrodes and common electrode lines; forming a second transparent conductive film, and patterning it to form patterns including the common electrode.