发明申请
US20120107996A1 SURFACE TREATMENT PROCESS PERFORMED ON A TRANSPARENT CONDUCTIVE OXIDE LAYER FOR SOLAR CELL APPLICATIONS
审中-公开
用于太阳能电池应用的透明导电氧化层的表面处理工艺
- 专利标题： SURFACE TREATMENT PROCESS PERFORMED ON A TRANSPARENT CONDUCTIVE OXIDE LAYER FOR SOLAR CELL APPLICATIONS
- 专利标题（中）： 用于太阳能电池应用的透明导电氧化层的表面处理工艺
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申请号： US12916526申请日： 2010-10-30
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公开(公告)号： US20120107996A1公开(公告)日： 2012-05-03
- 发明人: Shuran Sheng , Lin Zhang , Zheng Yuan , Yong Kee Chae
- 申请人： Shuran Sheng , Lin Zhang , Zheng Yuan , Yong Kee Chae
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： H01L31/18
- IPC分类号： H01L31/18
摘要：
Embodiments of the invention provide methods of a surface treatment process performing on a transparent conductive oxide layer used in solar cell devices. In one embodiment, a method of performing a surface treatment process includes providing a substrate having a transparent conductive oxide layer disposed thereon in a processing chamber, supplying a gas mixture including an oxygen containing gas into the processing chamber, and performing a surface treatment process using the gas mixture on the surface of the transparent conductive oxide layer.