Invention Application
- Patent Title: METHODS OF FORMING A PHASE CHANGE MATERIAL
- Patent Title (中): 形成相变材料的方法
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Application No.: US13347919Application Date: 2012-01-11
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Publication No.: US20120108037A1Publication Date: 2012-05-03
- Inventor: Keith R. Hampton
- Applicant: Keith R. Hampton
- Applicant Address: US ID Boise
- Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee: MICRON TECHNOLOGY, INC.
- Current Assignee Address: US ID Boise
- Main IPC: H01L21/365
- IPC: H01L21/365 ; B82Y40/00
![METHODS OF FORMING A PHASE CHANGE MATERIAL](/abs-image/US/2012/05/03/US20120108037A1/abs.jpg.150x150.jpg)
Abstract:
A phase change material including a high adhesion phase change material formed on a dielectric material and a low adhesion phase change material formed on the high adhesion phase change material. The high adhesion phase change material includes a greater amount of at least one of nitrogen and oxygen than the low adhesion phase change material. The phase change material is produced by forming a first chalcogenide compound material including an amount of at least one of nitrogen and oxygen on the dielectric material and forming a second chalcogenide compound including a lower percentage of at least one of nitrogen and oxygen on the first chalcogenide compound material. A phase change random access memory device, and a semiconductor structure are also disclosed.
Public/Granted literature
- US08703588B2 Methods of forming a phase change material Public/Granted day:2014-04-22
Information query
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