发明申请
- 专利标题： INERTIAL SENSOR
- 专利标题（中）： 惯性传感器
-
申请号： US13283517申请日： 2011-10-27
-
公开(公告)号： US20120125096A1公开(公告)日： 2012-05-24
- 发明人: Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
- 申请人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
- 申请人地址： KR Gyunggi-do
- 专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人地址： KR Gyunggi-do
- 优先权： KR1020100115015 20101118
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values.