Invention Application
US20120125535A1 THIN FILM DRYING METHOD AND ALIGNMENT FILM DRYING METHOD AND METHOD FOR MANUFACTURING DISPLAY PANEL
审中-公开
薄膜干燥方法和对准膜干燥方法及制造显示面板的方法
- Patent Title: THIN FILM DRYING METHOD AND ALIGNMENT FILM DRYING METHOD AND METHOD FOR MANUFACTURING DISPLAY PANEL
- Patent Title (中): 薄膜干燥方法和对准膜干燥方法及制造显示面板的方法
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Application No.: US13217600Application Date: 2011-08-25
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Publication No.: US20120125535A1Publication Date: 2012-05-24
- Inventor: Chengming He , Xingke Zheng , Hsiang-yin Shih , Wei-chun Lee , Bing-jei Liao
- Applicant: Chengming He , Xingke Zheng , Hsiang-yin Shih , Wei-chun Lee , Bing-jei Liao
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen
- Priority: CN201010553829.6 20101118
- Main IPC: F26B5/04
- IPC: F26B5/04 ; B29C65/48
Abstract:
The present invention provides a thin film drying method, an alignment film drying method and a method for manufacturing a display panel. The thin film drying method comprises the following steps: forming the thin film on a substrate; placing the substrate in a vacuum chamber; and reducing a pressure in the vacuum chamber. The thin film drying method can be applicable to the alignment film drying method and the method for manufacturing the display panel. The invention can enhance the film quality after drying.
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