发明申请
US20120127468A1 THROUGH-THE-LENS ILLUMINATOR FOR OPTICAL COMPARATOR 有权
光学比较器的透镜照明器

THROUGH-THE-LENS ILLUMINATOR FOR OPTICAL COMPARATOR
摘要:
An illumination system shares portions of an objective of an optical inspection system. A plurality of beam-shaping optics collects light from a plurality of effective light sources and directs the light through a portion of the objective for illuminating an object under inspection. The objective includes a front relay lens, a rear relay lens, and an objective stop disposed between the front and rear relay lenses for collecting light scattered from the object and forming an image of the object with the collected light. The beam-shaping optics, which surround the objective stop, are arranged together with the associated effective light sources for non-uniformly distributing light within a range of angles required for illuminating the object.
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