发明申请
- 专利标题： MICROHEATER AND MICROHEATER ARRAY
- 专利标题（中）： 麦克风和微阵列
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申请号： US13284177申请日： 2011-10-28
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公开(公告)号： US20120132643A1公开(公告)日： 2012-05-31
- 发明人: Jun-hee CHOI , Joo-ho LEE , Mi-jeong SONG
- 申请人： Jun-hee CHOI , Joo-ho LEE , Mi-jeong SONG
- 申请人地址： KR Suwon-si
- 专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人： SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2010-0119787 20101129
- 主分类号： H05B3/02
- IPC分类号： H05B3/02
摘要：
A microheater and a microheater array are provided. The microheater includes a substrate, a column disposed on the substrate and a bridge supported by the column. A width of a portion of a bridge formed on the column is less than a width of a portion of the bridge that does not contact the column. The bridge may include a spring component.