- 专利标题: GROUP-III NITRIDE SEMICONDUCTOR LASER DEVICE, AND METHOD OF FABRICATING GROUP-III NITRIDE SEMICONDUCTOR LASER DEVICE
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申请号: US13367846申请日: 2012-02-07
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公开(公告)号: US20120135554A1公开(公告)日: 2012-05-31
- 发明人: Yusuke YOSHIZUMI , Shimpei TAKAGI , Takatoshi IKEGAMI , Masaki UENO , Koji KATAYAMA
- 申请人: Yusuke YOSHIZUMI , Shimpei TAKAGI , Takatoshi IKEGAMI , Masaki UENO , Koji KATAYAMA
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 优先权: JPP2009-295574 20091225
- 主分类号: H01L21/18
- IPC分类号: H01L21/18
摘要:
A method of fabricating a group-III nitride semiconductor laser device includes: preparing a substrate of a hexagonal group-III nitride semiconductor, where the substrate has a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, where the laser structure includes the substrate and a semiconductor region, and where the semiconductor region is formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal group-III nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.
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