Invention Application
US20120135573A1 METHOD FOR MANUFACTURING VERTICAL TRANSISTOR HAVING ONE SIDE CONTACT 审中-公开
用于制造具有单面接触的垂直晶体管的方法

  • Patent Title: METHOD FOR MANUFACTURING VERTICAL TRANSISTOR HAVING ONE SIDE CONTACT
  • Patent Title (中): 用于制造具有单面接触的垂直晶体管的方法
  • Application No.: US13160689
    Application Date: 2011-06-15
  • Publication No.: US20120135573A1
    Publication Date: 2012-05-31
  • Inventor: Jun Ki KIM
  • Applicant: Jun Ki KIM
  • Applicant Address: KR Icheon-si
  • Assignee: HYNIX SEMICONDUCTOR INC.
  • Current Assignee: HYNIX SEMICONDUCTOR INC.
  • Current Assignee Address: KR Icheon-si
  • Priority: KR10-2010-0119727 20101129
  • Main IPC: H01L21/336
  • IPC: H01L21/336
METHOD FOR MANUFACTURING VERTICAL TRANSISTOR HAVING ONE SIDE CONTACT
Abstract:
A method for manufacturing a vertical transistor having a one side contact includes: forming separate active regions using trenches, on a semiconductor substrate, the active regions having first and second side surfaces facing the trenches; forming a first liner on the first and second side surfaces; forming a second liner which exposes a lower portion of the first liner on the first side surface; forming a third liner covering the portion of the first layer exposed by the second liner; forming a sacrifice layer on the third liner to fill the trench; forming an etch barrier to selectively expose upper end portions of the first to third liners positioned adjacent to the first side surface; selectively removing the third liner not covered by the etch barrier to expose a portion of the first liner not covered by the second liner; selectively removing the exposed portion of the first liner to expose a lower portion of the first side surface; and forming a buried bit line contacted with the exposed portion of the first side surface.
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