发明申请
US20120138927A1 SEMICONDUCTOR DEVICE HAVING STACKED STRUCTURE INCLUDING THROUGH-SILICON-VIAS AND METHOD OF TESTING THE SAME
审中-公开
具有包括硅橡胶的堆叠结构的半导体器件及其测试方法
- 专利标题: SEMICONDUCTOR DEVICE HAVING STACKED STRUCTURE INCLUDING THROUGH-SILICON-VIAS AND METHOD OF TESTING THE SAME
- 专利标题(中): 具有包括硅橡胶的堆叠结构的半导体器件及其测试方法
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申请号: US13312000申请日: 2011-12-06
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公开(公告)号: US20120138927A1公开(公告)日: 2012-06-07
- 发明人: Uk-song KANG
- 申请人: Uk-song KANG
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2010-0123476 20101206
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A semiconductor device having a stacked structure including through-silicon-vias (TSVs) and a method of testing the semiconductor device. The semiconductor device includes a first semiconductor layer, one or more second semiconductor layers stacked on the first semiconductor layer, and a plurality of input through-silicon-vias (TSVs) to transmit signals from a plurality of input pads, respectively. In a test mode, a test signal from the plurality of input pads is transmitted through at least two test paths, and the test signal transmitted through each of the test paths is output as a test result with respect to each of the plurality of input TSVs through an output pad.
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