发明申请
- 专利标题: METHOD FOR MEASURING OPTICAL CHARACTERISTICS OF DIFFRACTION OPTICAL ELEMENT AND APPARATUS FOR MEASURING OPTICAL CHARACTERISTICS OF DIFFRACTION OPTICAL ELEMENT
- 专利标题(中): 用于测量衍射光学元件的光学特性的方法和用于测量衍射光学元件的光学特性的装置
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申请号: US13308097申请日: 2011-11-30
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公开(公告)号: US20120140209A1公开(公告)日: 2012-06-07
- 发明人: Takamasa ANDO , Tsuguhiro Korenaga
- 申请人: Takamasa ANDO , Tsuguhiro Korenaga
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 优先权: JP2006-336820 20061214
- 主分类号: G01B9/00
- IPC分类号: G01B9/00
摘要:
A measurement method and an evaluating apparatus are provided which accurately evaluate the light amount of a spot beam, the diffraction efficiency, and the intensity distribution in the optical axis direction by detecting even a weak diffracted beam in an arbitrary wavelength range converged by a diffraction optical element as an imaging lens. Light emitted from a white light source passes through a wavelength band-pass filter and is diaphragmed by a pinhole slit. The resultant light is paralleled by a collimator lens and enters a diffraction optical element as an imaging lens. The light getting out from the diffraction optical element is converged to be a spot beam, is magnified by a microscope 18, and is then projected on a CCD. A distance changing member changes the distance between the CCD and the diffraction optical element, and then, the intensity distribution in the optical axis direction is measured.
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