发明申请
US20120140331A1 METHOD FOR FABRICATING MICRO-LENS, AND MICRO-LENS ARRAY INCLUDING THE MICRO-LENS
审中-公开
用于制作微透镜的方法和包括微透镜的微透镜阵列
- 专利标题： METHOD FOR FABRICATING MICRO-LENS, AND MICRO-LENS ARRAY INCLUDING THE MICRO-LENS
- 专利标题（中）： 用于制作微透镜的方法和包括微透镜的微透镜阵列
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申请号： US13163125申请日： 2011-06-17
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公开(公告)号： US20120140331A1公开(公告)日： 2012-06-07
- 发明人: Young Je YUN , Jin Ho Park
- 申请人： Young Je YUN , Jin Ho Park
- 优先权： KR10-2010-0121265 20101201
- 主分类号： G02B27/12
- IPC分类号： G02B27/12 ; B05D5/06
摘要：
A method for fabricating a micro-lens includes forming a photo-resist film on and/or over a micro-lens formation area of a semiconductor substrate, and then forming a portion of the photo-resist film as a first micro-lens using a first gray-tone mask. A second micro-lens is then formed adjacent to the first micro-lens using another portion of the photo-resist film and a second gray-tone mask.
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