发明申请
US20120144361A1 PARAMETERIZED DUMMY CELL INSERTION FOR PROCESS ENHANCEMENT 有权
用于过程增强的参数化DUMMY CELL插入

PARAMETERIZED DUMMY CELL INSERTION FOR PROCESS ENHANCEMENT
摘要:
The present disclosure relates to parameterized dummy cell insertion for process enhancement and methods for fabricating the same. In accordance with one or more embodiments, methods include providing an integrated circuit (IC) design layout with defined pixel-units, simulating thermal effect to the IC design layout including each pixel-unit, generating a thermal effect map of the IC design layout including each pixel-unit, determining a target absorption value for the IC design layout, and performing thermal dummy cell insertion to each pixel-unit of the IC design layout based on the determined target absorption value.
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