发明申请
US20120145332A1 SYSTEM FOR SEPARATING A DICED SEMICONDUCTOR DIE FROM A DIE ATTACH TAPE
有权
用于从DIE连接胶带分离一个DICED SEMICONDUCTOR DIE的系统
- 专利标题: SYSTEM FOR SEPARATING A DICED SEMICONDUCTOR DIE FROM A DIE ATTACH TAPE
- 专利标题(中): 用于从DIE连接胶带分离一个DICED SEMICONDUCTOR DIE的系统
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申请号: US13398647申请日: 2012-02-16
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公开(公告)号: US20120145332A1公开(公告)日: 2012-06-14
- 发明人: Jack Chang Chien , KH Ong , Weili Wang , Li Wang , XingZhi Liang , Shicai Ma
- 申请人: Jack Chang Chien , KH Ong , Weili Wang , Li Wang , XingZhi Liang , Shicai Ma
- 优先权: CN200910179844.6 20091012
- 主分类号: B32B38/10
- IPC分类号: B32B38/10
摘要:
A system is disclosed for ejecting a semiconductor die from a tape to which the die is affixed during the wafer dicing process. In embodiments, the system includes an ejector tool including a support table, ejector pins and a pick-up arm. The support table is connected to a vacuum source for creating a negative pressure at an interface between the tape and support table. The support table further includes an aperture with one or more chamfered sidewalls. The vacuum source is connected to the aperture so that, upon placement of the tape on the support table with a die centered over the aperture, the vacuum source pulls a portion of the tape around the edges of the semiconductor die away from the die and into the space created by the chamfered edges.
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