发明申请
- 专利标题: RADIATION DETECTION APPARATUS AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 辐射检测装置及其制造方法
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申请号: US13285619申请日: 2011-10-31
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公开(公告)号: US20120145905A1公开(公告)日: 2012-06-14
- 发明人: Keiichi Nomura , Satoshi Okada , Kazumi Nagano , Yohei Ishida , Tomoaki Ichimura , Yoshito Sasaki
- 申请人: Keiichi Nomura , Satoshi Okada , Kazumi Nagano , Yohei Ishida , Tomoaki Ichimura , Yoshito Sasaki
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-277424 20101213
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; G01T1/16
摘要:
A method for manufacturing a radiation detection apparatus is provided. The method comprising: forming a set of columnar crystals capable of converting radiation into visible light on a base; forming a supporting layer that supports the set of columnar crystals; separating the set of columnar crystals supported by the supporting layer from the base; preparing a sensor panel having a photoelectric conversion unit; and adhering a surface of the set of columnar crystals, that surface having been in contact with the base, to the sensor panel using an adhesive material, such that the set of columnar crystals covers the photoelectric conversion unit.
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