发明申请
US20120146508A1 MEASURING AND CONTROLLING PARAMETERS OF A PLASMA GENERATOR 有权
等离子体发生器的测量和控制参数

MEASURING AND CONTROLLING PARAMETERS OF A PLASMA GENERATOR
摘要:
Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
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