发明申请
- 专利标题: MEASURING AND CONTROLLING PARAMETERS OF A PLASMA GENERATOR
- 专利标题(中): 等离子体发生器的测量和控制参数
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申请号: US12963209申请日: 2010-12-08
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公开(公告)号: US20120146508A1公开(公告)日: 2012-06-14
- 发明人: Siddharth P. Nagarkatti , Ali Shajii , Souheil Benzerrouk
- 申请人: Siddharth P. Nagarkatti , Ali Shajii , Souheil Benzerrouk
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 主分类号: H05H1/24
- IPC分类号: H05H1/24 ; G01R19/22 ; G01R19/00
摘要:
Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
公开/授权文献
- US08624501B2 Measuring and controlling parameters of a plasma generator 公开/授权日:2014-01-07
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