发明申请
- 专利标题: MEASUREMENT APPARATUS
- 专利标题(中): 测量装置
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申请号: US13309641申请日: 2011-12-02
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公开(公告)号: US20120147382A1公开(公告)日: 2012-06-14
- 发明人: Yoshiyuki OKADA
- 申请人: Yoshiyuki OKADA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-273941 20101208
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/14
摘要:
A measurement apparatus obtains a reference signal from reference light modulated at a first frequency and a measurement signal from measurement light reflected by a target object modulated at a second frequency along with movement of the target object in addition to the modulation at the first frequency, and processes the reference signal and the measurement signal to measure a position of the target object. Synchronized detection units multiply the measurement signal by a signal synchronized with the reference signal and output signals having the second frequency and harmonic components. Decimation filters filter, at a decimation frequency, the signals output from the synchronized detection units to attenuate the harmonic components.
公开/授权文献
- US08868379B2 Measurement apparatus 公开/授权日:2014-10-21
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