发明申请
- 专利标题: Spectrometer
- 专利标题(中): 光谱仪
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申请号: US13161485申请日: 2011-06-15
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公开(公告)号: US20120154801A1公开(公告)日: 2012-06-21
- 发明人: Keith Carron , Mark Watson , Shane Buller
- 申请人: Keith Carron , Mark Watson , Shane Buller
- 申请人地址: US WY Centennial
- 专利权人: MKS Technology (d/b/a Snowy Range Instruments)
- 当前专利权人: MKS Technology (d/b/a Snowy Range Instruments)
- 当前专利权人地址: US WY Centennial
- 主分类号: G01J3/44
- IPC分类号: G01J3/44
摘要:
A spectroscopic system is provided. In one embodiment, the spectroscopic system comprises a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector, wherein the optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector; a calibration detector adapted to determine a set point of the adjustable dispersing element; and a source synchronization component adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided. In one embodiment, the method comprises determining a set point along a path of an adjustable dispersing element, wherein the set point corresponds to a position of the dispersing element where a calibration signal of a spectrometer is detected at a calibration sensor of the spectrometer; adjusting the position of the dispersing element along the path by a predetermined offset measurement from the set point; and directing at least a portion of a spectroscopic signal from the dispersing element to a spectroscopic signal detector of the spectrometer.
公开/授权文献
- US08867033B2 Spectrometer 公开/授权日:2014-10-21
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