发明申请
- 专利标题: VITREOUS SILICA CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 用于拉丝硅单晶的耐火二氧化硅巧克力及其制造方法
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申请号: US13394284申请日: 2010-08-10
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公开(公告)号: US20120160159A1公开(公告)日: 2012-06-28
- 发明人: Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
- 申请人: Toshiaki Sudo , Makiko Kodama , Minoru Kanda , Hiroshi Kishi
- 申请人地址: JP Akita-shi, Akita
- 专利权人: JAPAN SUPER QUARTZ CORPORATION
- 当前专利权人: JAPAN SUPER QUARTZ CORPORATION
- 当前专利权人地址: JP Akita-shi, Akita
- 优先权: JP2009-208853 20090910
- 国际申请: PCT/JP2010/064053 WO 20100810
- 主分类号: C30B15/10
- IPC分类号: C30B15/10 ; C03B20/00
摘要:
The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.