Invention Application
- Patent Title: REPETITION FREQUENCY CONTROL DEVICE
- Patent Title (中): 重复频率控制装置
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Application No.: US13310130Application Date: 2011-12-02
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Publication No.: US20120163404A1Publication Date: 2012-06-28
- Inventor: Tomoyu YAMASHITA , Akiyoshi IRISAWA
- Applicant: Tomoyu YAMASHITA , Akiyoshi IRISAWA
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST CORPORATION
- Current Assignee: ADVANTEST CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-289901 20101227
- Main IPC: H01S3/13
- IPC: H01S3/13

Abstract:
According to the repetition frequency control device, a master laser outputs a master laser light pulse the repetition frequency of which is controlled to a predetermined value. A slave laser outputs a slave laser light pulse. A reference comparator compares a voltage of a reference electric signal the repetition frequency of which is the predetermined value and a predetermined voltage with each other, thereby outputting a result thereof. A measurement comparator compares a voltage based on a light intensity of the slave laser light pulse and the predetermined voltage with each other, thereby outputting a result thereof. A phase difference detector detects a phase difference between the output from the reference comparator and the output from the measurement comparator. A loop filter removes a high-frequency component of an output from the phase difference detector.
Public/Granted literature
- US08718108B2 Repetition frequency control device Public/Granted day:2014-05-06
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