Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US13377766Application Date: 2011-04-25
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Publication No.: US20120168823A1Publication Date: 2012-07-05
- Inventor: Zhijiong Luo , Haizhou Yin , Huilong Zhu
- Applicant: Zhijiong Luo , Haizhou Yin , Huilong Zhu
- Priority: CN201010617447.5 20101231
- International Application: PCT/CN2011/073257 WO 20110425
- Main IPC: H01L29/26
- IPC: H01L29/26 ; H01L21/66

Abstract:
The present application discloses a semiconductor device and a method for forming the same. The method comprises: providing a first semiconductor layer and forming a first STI in the first semiconductor layer; determining a selected region in the first semiconductor layer, and making a portion of the first semiconductor layer in the selected region recessed; and in the selected region, epitaxially growing a second semiconductor layer on the first semiconductor layer, wherein the material of the second semiconductor layer is different from that of the first semiconductor layer. According to the present invention, a structure with a second semiconductor layer selectively epitaxially grown and embedded in the first semiconductor layer can be formed by a simple process, and defects generated during the epitaxial growth process can be further reduced.
Information query
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