Invention Application
US20120168823A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
半导体器件及其制造方法

  • Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
  • Patent Title (中): 半导体器件及其制造方法
  • Application No.: US13377766
    Application Date: 2011-04-25
  • Publication No.: US20120168823A1
    Publication Date: 2012-07-05
  • Inventor: Zhijiong LuoHaizhou YinHuilong Zhu
  • Applicant: Zhijiong LuoHaizhou YinHuilong Zhu
  • Priority: CN201010617447.5 20101231
  • International Application: PCT/CN2011/073257 WO 20110425
  • Main IPC: H01L29/26
  • IPC: H01L29/26 H01L21/66
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Abstract:
The present application discloses a semiconductor device and a method for forming the same. The method comprises: providing a first semiconductor layer and forming a first STI in the first semiconductor layer; determining a selected region in the first semiconductor layer, and making a portion of the first semiconductor layer in the selected region recessed; and in the selected region, epitaxially growing a second semiconductor layer on the first semiconductor layer, wherein the material of the second semiconductor layer is different from that of the first semiconductor layer. According to the present invention, a structure with a second semiconductor layer selectively epitaxially grown and embedded in the first semiconductor layer can be formed by a simple process, and defects generated during the epitaxial growth process can be further reduced.
Information query
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L29/00 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件(H01L31/00至H01L47/00,H01L51/05优先;除半导体或其电极之外的零部件入H01L23/00;由在一个共用衬底内或其上形成的多个固态组件组成的器件入H01L27/00)
H01L29/02 .按其半导体本体的特征区分的
H01L29/12 ..按其构成材料的特征区分的
H01L29/26 ...除掺杂材料或其他杂质外,包括有包含在H01L29/16,H01L29/18,H01L29/20,H01L29/22,H01L29/24各组中两组或更多个组内的元素的
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