发明申请
- 专利标题: ELECTROLYTIC MACHINING METHOD AND SEMIFINISHED WORKPIECE BY THE ELECTROLYTIC MACHINING METHOD
- 专利标题(中): 电解加工方法和半导体工件的电解加工方法
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申请号: US13242661申请日: 2011-09-23
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公开(公告)号: US20120171507A1公开(公告)日: 2012-07-05
- 发明人: JUNG-CHOU HUNG , DA-YU LIN
- 申请人: JUNG-CHOU HUNG , DA-YU LIN
- 申请人地址: TW KAOHSIUNG CITY
- 专利权人: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
- 当前专利权人: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
- 当前专利权人地址: TW KAOHSIUNG CITY
- 优先权: TW099146789 20101230
- 主分类号: B32B15/01
- IPC分类号: B32B15/01 ; B32B3/00 ; B23H3/00
摘要:
The present invention relates to an electrolytic machining method. For increasing size precision of electrolytic machining method, a metallic mask layer is formed on the surface of a workpiece whose material has high conductivity or volume electrochemical equivalent, whereby the metallic mask layer can be used as a sacrificial layer of electrolytic machining and simultaneously protects the non-machining region of the workpiece so as to reduce lateral machining of the workpiece Consequently, the size precision of electrolytic machining is enhanced. In addition, the feasibility of electrolytically machining a miniature interval between two machined structures is increased as well. In addition, the present invention provides a semifinished electrolytic workpiece, comprising a workpiece and a metallic mask layer formed on the surface of the workpiece. The conductivity or volume electrochemical equivalent of the metallic mask layer is smaller than that of the workpiece.
公开/授权文献
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