Invention Application
- Patent Title: SYSTEMS AND METHODS FOR PARTICLE SIZE DETERMINATION AND CONTROL IN A FLUIDIZED BED REACTOR FOR USE WITH THERMALLY DECOMPOSABLE SILICON-CONTAINING GAS
- Patent Title (中): 用于具有热分解含硅气体的流化床反应器中颗粒尺寸测定和控制的系统和方法
-
Application No.: US12981074Application Date: 2010-12-29
-
Publication No.: US20120173165A1Publication Date: 2012-07-05
- Inventor: Satish Bhusarapu , Arif Nawaz , Puneet Gupta , Karthik Balakrishnan
- Applicant: Satish Bhusarapu , Arif Nawaz , Puneet Gupta , Karthik Balakrishnan
- Applicant Address: US MO St. Peters
- Assignee: MEMC ELECTRONIC MATERIALS, INC.
- Current Assignee: MEMC ELECTRONIC MATERIALS, INC.
- Current Assignee Address: US MO St. Peters
- Main IPC: B01J8/18
- IPC: B01J8/18 ; G06F19/00 ; G01N1/00
Abstract:
Systems and methods are provided for determining the size of particles within a fluidized bed reactor for use with thermally decomposable silicon-containing gas. The pressure of gas adjacent a gas inlet and adjacent a gas outlet of the reactor are measured with pressure sensors. An algorithm is applied to at least one of the pressure measurements to determine the size of particles within the reactor. The determined size of the particles can be used to control the operation of the reactor.
Public/Granted literature
Information query
