发明申请
- 专利标题: SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体封装及其制造方法
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申请号: US13347270申请日: 2012-01-10
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公开(公告)号: US20120175782A1公开(公告)日: 2012-07-12
- 发明人: Yunhyeok Im , Tae Hong Min , Taeje Cho
- 申请人: Yunhyeok Im , Tae Hong Min , Taeje Cho
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2011-0002401 20110110
- 主分类号: H01L23/522
- IPC分类号: H01L23/522
摘要:
Provided are a semiconductor package and a method of manufacturing the same. a substrate including a first face and a second face, wherein the first and second faces face each other; a first ground pattern disposed on the first face; a second ground pattern disposed on the second face; a plurality of ground via plugs which connect the first ground pattern and the second ground pattern, wherein the plurality of ground via plugs penetrate the substrate; and a first aluminum oxide film interposed between the plurality of ground via plugs, wherein a ground voltage is applied to the plurality of ground via plugs. The semiconductor package may be manufactured using an anodic oxidation process.
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